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Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. 1997 Hamamatsu Photonics K. K.
ULTRA THIN MCP ASSEMBLY
WITH CENTER HOLE
F6589
FEATURES
q
Ultra Thin Type: 2.5 mm (Max.)
Detection at closed distance from samples
q
Flexible Lead Out (polymide film)
Easy system design with a flexible wiring
Low outguessing for high vacuum operation
q
Light Weight
APPLICATIONS
q
SEM
q
FIB System
q
Mask Aligner
q
Electron Beam Measuring System
SPECIFICATIONS
Parameter
Value
Unit
GENERAL
Assembly Outer Diameter
28.0
mm
Effective Diameter
11.0
mm
Maximum Height
2.5
mm
MCP Channel Diameter
12
m
MCP Stage Number
2
stage
Centerpipe Inner Diameter
1
mm
Dead Area around Center Hole
4
mm
Electrical Potential
MCP-in
-0.4 to +0.4
kV
Anode
+2.4 (Max.)
MAXIMUM RATINGS
MCP Supply Voltage (In-Out)
2.0
kV
MCP Out-Anode Voltage
0.4
kV
Anode-Substrate Voltage
2.4
kV
Operating Vacuum Condition
Less than 6.7
10
-4
(5
10
-6
)
Pa (Torr)
Ambient Temperature
-50 to +70
C
Baking Temperature
200
C
Baking Time
8
hours
Vacuum Condition for Baking
Less than 6.7
10
-4
(5
10
-6
)
Pa (Torr)
Not allowed to be baked.
CHARACTERISTICS
Gain at 1.8kV
1
10
6
Min.
Plate Resistance
50 to 200
M
/MCP
Maximum Linear Output
7% of strip current under uniform input into
A
whole MCP effective area
DC Dark Current at 2kV
1
10
-10
A
Dark Count at 2kV
3
cps
TMCPF0083
HAMAMATSU PHOTONICS K.K., Electron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: (44)181-367-3560, Fax: (44)181-367-6384
North Europe: Hamamatsu Photonics Norden AB: Frgatan 7, S-164-40 Kista, Sweden, Telephone: (46)8-703-29-50, Fax: (46)8-750-58-95
Italy: Hamamatsu Photonics Italia S.R.L.: Via Della Moia, 1/E 20020 Arese, (Milano), Italy, Telephone: (39)2-935 81 733, Fax: (39)2-935 81 741
TMCP1011E03
MAR. 1998. CR (9705)
Printed in Japan
ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589
Figure 1: Merit of Ultra Thin MCP Assembly with Center Hole
Figure 2: Dimensional Outline (Unit: mm)
ULTRA THIN TYPE
CONVENTIONAL TYPE
Detection efficiency of secondary Electrons is improved with a closed distance from
sample.
TMCPC0039EA
,
,
,
,
,
6
4
2.2
MCP-IN LEAD
ANODE LEAD
MCP-OUT LEAD 8
10
POLYIMIDE FILM (Less Than 0.1t)
ELECTRODE : COPPER
58
63
SUBSTRATE
(TITANIUM)
1
EFFECTIVE AREA
18
2.5 MAX.
11
MCP (2 STAGE)
ANODE
(SUS-NM)
SUBSTRATE
PROTECTION ELECTRODE
FOR CHARGING-UP
(SAME POTENTIAL AS SUBSTRATE)
28
TMCPA0031EA
MCP
MCP
Secondary Electrons
Secondary Electrons
Stage
Sample
Sample
Stage
Electron
Electron
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