S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (
=193 nm). Designed to provide
optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with
conventional types.
Features
l Reliable detection improves of ArF excimer laser
(
=193 nm)
l Large active area
S8551: 5.8 5.8 mm
S8552: 10 10 mm
S8553: 18 18 mm
l Windowless package
S8551: TO-8 metal package
S8552: 16.5 15.0 mm ceramic package
S8553: 25.5 25.5 mm ceramic package
Applications
l ArF excimer laser detection
l Detection of various UV light sources
P H O T O D I O D E
Si photodiode
Photodiodes for VUV (Vacuum UV) detection
S8551, S8552, S8553
1
I Absolute maximum ratings (Ta=25 C)
Parameter
Symbol
Value
Unit
Reverse voltage
V
R
Max.5
V
Operating temperature
Topr
-20 to +60 *
C
Storage temperature
Tstg
-55 to +80 *
C
* No condensation
I Electrical and optical characteristics (Ta=25 C)
S8551
S8552
S8553
Parameter
Symbol
Condition
Min.
Typ.
Max.
Min.
Typ.
Max.
Min.
Typ.
Max.
Unit
P h oto s ensitivity
S
=193 nm
45
60
-
45
60
-
45
60
-
mA/W
Dark current
I
D
V
R
=10 mV
-
0.02
0.5
-
0.05
1.0
-
0.1
5.0
nA
Terminal
capacitance
Ct
V
R
=0 V, f=10 kHz
-
1.0
-
-
4.0
-
-
8. 0
-
nF
Rise time
tr
V
R
=0 V, R
L
=1 k
10 to 90 %
-
2
-
-
9
-
-
18
-
s
S8551, S8552 and S8553 use windowless packages with no protection on the photodiode chip. Always use the following
precautions when handling these photodiodes.
I Handling precautions
G Handle the photodiodes in a clean room.
G Never touch the photodiode chip surface and wire bonding.
G Wear dust-proof gloves and dust-proof mask.
G Use an air dust cleaner to blow away dust and foreign matter on the photodiode chip surface.
G Do not clean the photodiodes by any method other than air blow.
Si photodiode
S8551, S8552, S8553
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Hamamatsu City, 435-8558 Japan, Telephone: (81) 053-434-3311, Fax: (81) 053-434-5184, http://www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777
North Europe: Hamamatsu Photonics Norden AB: Smidesvgen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. 2002 Hamamatsu Photonics K.K.
Cat. No. KSPD1050E0
2
Ju
l. 2002 DN
2
CONVENTIONAL TYPE
RELATIVE SENSITIVITY (%)
NUMBER OF SHOT
[Typ. ArF excimer laser, 0.1 mJ/cm
2
/pulse, f=100 Hz,
=193 nm, pulse width=15 ns (FWHM)]
5 10
6
0
1 10
7
40
20
60
80
100
120
S8551, S8552, S8553
CASE
2.9
(15.0)
5.0 0.2
1.4
ANODE TERMINAL MARK
PHOTOSENSITIVE
SURFACE
CAP WITHOUT WINDOW
0.5 MAX.
LEAD
13.9 0.2
12.35 0.1
10.5 0.1
0.45
7.5 0.2
1.0 MAX.
ACTIVE AREA
5.8 5.8
ANODE TERMINAL
MARK
0.5
LEAD
PHOTOSENSITIVE
SURFACE
16.5 0.2
15.0 0.15
2.15 0.1
10.5
0.75
0.3
15.1 0.3
12.5 0.2
13.7 0.3
ACTIVE AREA
10 10
PHOTOSENSITIVE
SURFACE
18.0
3.4
25.5
18.0
25.5
10
2.54
1.1
5.0
1.75
+
0
-
0.6
+0
- 0.6
0.45
LEAD
WHITE CERAMIC
ACTIVE AREA
18 18
S8551
S8552
S8553
I Variation in sensitivity due to VUV exposure
I Dimensional outlines (unit: mm)
KSPDA0142EA
KSPDB0188EB
KSPDA0143EA
KSPDA0144EA
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