1
Motorola Sensor Device Data
100 kPa
On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPX2100 and MPX2101 series device is a silicon piezoresistive pressure sensors
providing a highly accurate and linear voltage output -- directly proportional to the
applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thinfilm resistor network integrated onchip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation.
Features
Temperature Compensated Over 0
C to + 85
C
Unique Silicon Shear Stress Strain Gauge
Easy to Use Chip Carrier Package Options
Available in Absolute, Differential and Gauge Configurations
Ratiometric to Supply Voltage
0.25% Linearity (MPX2100D)
Application Examples
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the standalone
pressure sensor chip.
Figure 1. Temperature Compensated Pressure Sensor Schematic
VS
3
Xducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2
4
Vout+
Vout
1
GND
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the Xducer is directly proportional to the differential
pressure applied.
The absolute sensor has a builtin reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and Xducer are trademarks of Motorola, Inc.
Order this document
by MPX2100/D
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Motorola, Inc. 1997
BASIC CHIP
CARRIER ELEMENT
CASE 34415, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C01, STYLE 1
MPX2100
MPX2101
SERIES
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
2
Gnd
+Vout
3
4
VS
Vout
Motorola Preferred Device
REV 6
MPX2100 MPX2101 SERIES
2
Motorola Sensor Device Data
MAXIMUM RATINGS
Rating
Symbol
Value
Unit
Overpressure(8) (P1 > P2)
Pmax
400
kPa
Burst Pressure(8) (P1 > P2)
Pburst
1000
kPa
Storage Temperature
Tstg
40 to +125
C
Operating Temperature
TA
40 to +125
C
OPERATING CHARACTERISTICS
(VS = 10 Vdc, TA = 25
C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
POP
0
--
100
kPa
Supply Voltage(2)
VS
--
10
16
Vdc
Supply Current
Io
--
6.0
--
mAdc
Full Scale Span(3)
MPX2100A, MPX2100D, MPX2101D
MPX2101A
VFSS
38.5
37.5
40
40
41.5
42.5
mV
Offset(4)
MPX2100D, MPX2101D
MPX2100A
MPX2101A
Voff
1.0
2.0
3.0
--
--
--
1.0
2.0
3.0
mV
Sensitivity
V/
P
--
0.4
--
mV/kPa
Linearity(5)
MPX2100D
MPX2100A
MPX2101D
MPX2101A
--
--
0.25
1.0
0.5
2.0
--
--
--
--
0.25
1.0
0.5
2.0
%VFSS
Pressure Hysteresis(5) (0 to 100 kPa)
--
--
0.1
--
%VFSS
Temperature Hysteresis(5) ( 40
C to +125
C)
--
--
0.5
--
%VFSS
Temperature Effect on Full Scale Span(5)
TCVFSS
1.0
--
1.0
%VFSS
Temperature Effect on Offset(5)
TCVoff
1.0
--
1.0
mV
Input Impedance
Zin
1000
--
2500
Output Impedance
Zout
1400
--
3000
Response Time(6) (10% to 90%)
tR
--
1.0
--
ms
WarmUp
--
--
20
--
ms
Offset Stability(9)
--
--
0.5
--
%VFSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
Typ
Max
Unit
Weight (Basic Element Case 34415)
--
--
2.0
--
Grams
Common Mode Line Pressure(7)
--
--
--
690
kPA
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device selfheating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25
C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85
C, relative to 25
C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85
C, relative
to 25
C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the casetolead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPX2100 MPX2101 SERIES
3
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the "best case" linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the "worst case" error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola's
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Figure 2. Linearity Specification Comparison
LEAST
SQUARE
DEVIATION
RELA
TIVE VOL
T
AGE OUTPUT
PRESSURE (% FULLSCALE)
0
50
100
END POINT
STRAIGHT LINE FIT
EXAGGERATED
PERFORMANCE
CURVE
LEAST SQUARES FIT
STRAIGHT LINE
DEVIATION
OFFSET
ONCHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX2100
series at 25
C. The output is directly proportional to the
differential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteris-
tics.
Figure 3. Output versus Pressure Differential
Figure 4. CrossSectional Diagrams (Not to Scale)
OUTPUT
(mVdc)
kPa
PSI
40
35
30
25
15
10
5
0
5
0
25
3.62
50
7.25
75
10.87
100
14.5
SPAN
RANGE
(TYP)
OFFSET
(TYP)
20
TYP
MIN
VS = 10 Vdc
TA = 25
C
P1 > P2
MAX
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE
DIE
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIFFERENTIAL/GAUGE ELEMENT
DIE
BOND
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
ABSOLUTE
DIE
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIE
BOND
ABSOLUTE ELEMENT
P1
P2
P1
P2
Figure 4 illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 34415). A silicone gel isolates the die
surface and wire bonds from the environment, while allowing
t h e p r e s s u r e s i g n a l t o b e t r a n s m i t t e d t o t h e s i l i c o n
diaphragm.
The MPX2100 series pressure sensor operating charac-
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
MPX2100 MPX2101 SERIES
4
Motorola Sensor Device Data
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The differential or gauge sensor is
designed to operate with positive differential pressure
applied, P1 > P2. The absolute sensor is designed for
vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
Pressure (P1) Side Identifier
MPX2100A
MPX2100D
MPX2101A
34415
C
Stainless Steel Cap
MPX2100DP
MPX2101DP
344C01
Side with Part Marking
MPX2100AP
MPX2100GP
MPX2101AP
MPX2101GP
344B01
Side with Port Attached
MPX2100GVP
MPX2101GVP
344D01
Stainless Steel Cap
MPX2100AS
344E01
Side with Port Attached
MPX2100GVS
344A01
Stainless Steel Cap
MPX2100ASX
MPX2100GSX
MPX2101GSX
344F01
Side with Port Attached
MPX2100GVSX
344G01
Stainless Steel Cap
ORDERING INFORMATION
MPX2100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
D
i
T
O
i
C
T
MPX Series
Device Type
Options
Case Type
Order Number
Device Marking
Basic Element
Absolute, Differential
Case 34415
MPX2100A
MPX2100D
MPX2101A
MPX2100A
MPX2100D
MPX2101A
Ported Elements
Differential
Case 344C01
MPX2100DP
MPX2101DP
MPX2100DP
MPX2101DP
Absolute, Gauge
Case 344B01
MPX2100AP
MPX2100GP
MPX2101AP
MPX2101GP
MPX2100AP
MPX2100GP
MPX2101AP
MPX2101GP
Gauge Vacuum
Case 344D01
MPX2100GVP
MPX2101GVP
MPX2100GVP
MPX2101GVP
Absolute, Gauge Stove Pipe
Case 344E01
MPX2100AS
MPX2100GS
MPX2100A
MPX2100D
Gauge Vacuum Stove Pipe
Case 344A01
MPX2100GVS
MPX2100D
Absolute, Gauge Axial
Case 344F01
MPX2100ASX
MPX2100GSX
MPX2101GSX
MPX2100A
MPX2100D
MPX2101D
Gauge Vacuum Axial
Case 344G01
MPX2100GVSX
MPX2100D
MPX2100 MPX2101 SERIES
5
Motorola Sensor Device Data
PACKAGE DIMENSIONS
CASE 34415
ISSUE W
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. OUTPUT
M
A
M
0.136 (0.005)
T
1
2
3
4
PIN 1
R
N
L
G
F
D
4 PL
SEATING
PLANE
T
C
M
J
B
A
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
0.595
0.630
15.11
16.00
B
0.514
0.534
13.06
13.56
C
0.200
0.220
5.08
5.59
D
0.016
0.020
0.41
0.51
F
0.048
0.064
1.22
1.63
G
0.100 BSC
2.54 BSC
J
0.014
0.016
0.36
0.40
L
0.695
0.725
17.65
18.42
M
30 NOM
30 NOM
N
0.475
0.495
12.07
12.57
R
0.430
0.450
10.92
11.43
_
_
NOTES:
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
POSITIVE
PRESSURE (P1)
POSITIVE
PRESSURE
(P1)
CASE 344A01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. OUTPUT
POSITIVE
PRESSURE
PIN 1
4 PL
PORT #2
VACUUM
PRESSURE
1
SEATING
PLANE
2
3 4
K
A
S
G
F
D
M
B
M
0.13 (0.005)
T
C
N
R
V
J
B
T
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
0.690
0.720
17.53
18.28
B
0.245
0.255
6.22
6.48
C
0.780
0.820
19.81
20.82
D
0.016
0.020
0.41
0.51
F
0.048
0.064
1.22
1.63
G
0.100 BSC
2.54 BSC
J
0.014
0.016
0.36
0.41
K
0.345
0.375
8.76
9.53
N
0.300
0.310
7.62
7.87
R
0.178
0.186
4.52
4.72
S
V
0.182
0.194
4.62
4.93
0.220
0.240
5.59
6.10
(P1)
(P2)
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